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Field Emission Gun Scanning Electron Microscope

Zeiss Gemini 500

The Gemini objective-lens design combines electrostatic and magnetic fields to maximize optical performance while reducing field influences at the sample to a minimum. This enables excellent imaging, even on challenging samples such as magnetic materials.

The Gemini detection concept ensures efficient signal detection by detecting secondary (SE) and backscattered (BSE) electrons in parallel. These so-called inlens detectors are arranged on the optical axis, reducing the need for realignment and minimizing time to image.

Gemini beam-booster technology guarantees small probe sizes and high signal-to-noise ratios, right down to very low accelerating voltages. It also minimizes system sensitivity to external stray fields by keeping the beam at high voltage throughout the column until its final deceleration. 

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