The FEI Quanta 200 ESEM
This environmental scanning electron microscope has a tungsten filament and EDAX Genesis energy-dispersive X-ray spectrometer 30mm2 detector with 132 eV resolution. The microscope has 4 nm spatial resolution and can detect characteristic X-rays down to and including beryllium, although sensitivity is limited for light elements.
It can operate in the low-vacuum range (10-3 to 0.8 Torr) and in environmental mode (0.1 to 40 Torr). In the environmental mode, it is possible to examine samples from at 100 percent relative humidity, making this a highly versatile instrument.
The EDAX Genesis software allows the user to collect spectra and elemental maps in both manual and automated modes. With this instrument, it is possible to view and perform X-ray analysis on non-conducting samples or "wet samples" without having to coat or dry.
Training is available for students, staff and faculty members.